Quality Control Plan for Engineered Ge substrates: Examining the Scope and Suitability of Spectroscopic Ellipsometry |
Jinyoun Cho, Rajiv Sharma, Robin Vanuytven, Priyanka Proost, Eric Tan, Kristof Dessein Umicore Electro-Optic Materials, Olen, --, Belgium |
Reducing germanium consumption is crucial for a sustainable future for space, and engineered Ge substrates are an effective way to achieve this goal. However, this requires not only produce manufacturing, but also quality control methods for the process and the product. Several quality control parameters need to be monitored, and spectroscopic ellipsometry (SE) can provide various characteristics, such as thickness and porosity of the porous layer, the foil, and the void layer. The feasibility of this method was investigated on engineered Ge substrates, and the results were promising. Nevertheless, to enhance the reliability of the data, more measurements with improved quality substrates are needed, and other techniques will be evaluated for quality control purposes. |